THE MODEL MF1100B MASS FLOW CONTROLLER FEATURES EXTENDED CAPABILITY OF RANGES UP TO 20 SLM, HIGHER TERMPERATURE STABILITY AND MANY FUNCTIONS.
MASS FLOW CONTROLLER/
|
Datasheet (pdf) |
■ MINIMUN RANGE OF 5 SCCM & UP TO 20 SLM ■ COMPACT SIZE ■ STANDARD SOFT-START FUNCTION ■ MINIMUM LEAKAGE OF 1.013×10-9Pa·m3/s (He) |